Description: Volume 3: The Submicron MOSFET. Treats the topics of submicron MOSFET device physics and the relationship between such device physics and submicron MOSFET fabrication. DLC: Integrated circuits - Very large scale.
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price: 49.04
yearPublished: 1994
Author: Wolf, Stanley
Book Title: Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFE
Language: English
Format: Hardcover